(window.webpackJsonp=window.webpackJsonp||[]).push([[577],{892:function(t,s,a){"use strict";a.r(s);var n=a(10),e=Object(n.a)({},(function(){var t=this,s=t._self._c;return s("ContentSlotsDistributor",{attrs:{"slot-key":t.$parent.slotKey}},[s("h1",{attrs:{id:"mems技术"}},[s("a",{staticClass:"header-anchor",attrs:{href:"#mems技术"}},[t._v("#")]),t._v(" MEMS技术")]),t._v(" "),s("h2",{attrs:{id:"什么是mems技术"}},[s("a",{staticClass:"header-anchor",attrs:{href:"#什么是mems技术"}},[t._v("#")]),t._v(" 什么是MEMS技术？")]),t._v(" "),s("p",[t._v("Micro-Electro-Mechanical Systems MEMS（微机电系统），是指以微型化、系统化的理论为指导，通过半导体制造等微纳加工手段，形成特征尺度为微纳米量级的系统装置。相对于先进的集成电路（IC）制造工艺（遵循摩尔定律），MEMS制造工艺不单纯追求线宽而注重功能特色化，即利用微纳结构或/和敏感材料实现多种传感和执行功能，工艺节点通常从500nm到110nm，衬底材料也不局限硅，还包括玻璃、聚合物、金属等。由MEMS技术构建的产品往往具有体积小、重量轻、功耗低、成本低等优点，已广泛应用于汽车、手机、工业、医疗、国防、航空航天等领域。")]),t._v(" "),s("p",[t._v("MEMS设备由机电元件（移动或不移动）组成，由集成微电子控制。")]),t._v(" "),s("p",[t._v("MEMS的功能元素是小型化结构、传感器、执行器和微电子。微传感器和微执行器被归类为传感器，是将测量的机械信号转换为电气信号的设备。")]),t._v(" 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